Characterization Techniques for Thin Film Coatings Based on SiO₂, TiO₂, and ZrO₂

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Year : 2026 | Volume : 16 | 02 | Page :
By

Samjeet Singh Thakur,

Diwaker,

  1. Assistant Professor, Chemistry Department; NSCBM Govt. College Hamirpur, Himachal Pradesh, India
  2. Assistant Professor, Physics Department; SCVB Govt. College Palampur, Himachal Pradesh,

Abstract

Thin film coatings made from silicon dioxide (SiO₂), titanium dioxide (TiO₂) and zirconium dioxide (ZrO₂) have attracted great interest owing to their excellent optical, electrical, mechanical and chemical properties. These oxide thin films are widely used in microelectronics, solar cells, sensors, biomedical devices, photocatalysis, anti-reflective coatings and protective layers. The structural, morphological, compositional, optical and mechanical properties of these coatings are closely related to their performance and reliability. Therefore, thorough characterization methods are required to assess the film quality and adjust the deposition conditions. This article gives an overview of major characterization approaches for SiO2, TiO2 and ZrO2 thin film coatings. Structural analysis techniques like X-ray diffraction (XRD), morphological studies using scanning electron microscopy (SEM) and atomic force microscopy (AFM), compositional investigations using energy dispersive X-ray spectroscopy (EDX) and X-ray photoelectron spectroscopy (XPS), optical characterization using UV–Visible spectroscopy and ellipsometry, and mechanical characterization techniques including nanoindentation are detailed. The paper also points out the significance of these procedures in crystallinity, surface roughness, elemental composition, optical band gap, refractive index, hardness and adhesion qualities. Recent developments and applications of oxide thin film characterization are also very briefly discussed.

Keywords: Thin films, SiO₂ coatings, TiO₂ coatings, ZrO₂ coatings, characterization techniques, XRD, SEM, AFM, optical properties.

How to cite this article: Samjeet Singh Thakur, Diwaker. Characterization Techniques for Thin Film Coatings Based on SiO₂, TiO₂, and ZrO₂. Journal of Materials & Metallurgical Engineering. 2026; 16(02):-.
How to cite this URL: Samjeet Singh Thakur, Diwaker. Characterization Techniques for Thin Film Coatings Based on SiO₂, TiO₂, and ZrO₂. Journal of Materials & Metallurgical Engineering. 2026; 16(02):-. Available from: https://journals.stmjournals.com/jomme/article=2026/view=253423

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Ahead of Print Subscription Original Research
Volume 16
02
Received 02/06/2026
Accepted 21/08/2026
Published 26/08/2026
Publication Time 85 Days

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