Performance Analysis of a Three-DOF Piezoelectric Vibration Energy Harvester

Open Access

Year : 2023 | Volume :11 | Special Issue : 09 | Page : 10-18

Dr S Srinivasulu Raju


Mechanical vibration energy can be transformed into electrical energy by a vibration energy harvester, which can then be stored in the battery for later use. It can convert vibrational motions like walking, leaping, running, etc. into pure renewable energy. This can turn previously squandered energy into energy that can be used to recharge wireless sensors and portable electronics. If these gadgets are used widely, they can produce a lot of green energy and contribute to environmental protection. The majority of MEMS energy harvesters are made to collect energy solely in one direction. A new three-Degree of freedom (DOF) MEMS piezoelectric vibration harvester solution is proposed in this work. A core silicon mass in the shape of a H is sustained by two pairs of T-beams on either side of the device. The mass is fixed on both sides along four sets of folded beams that oscillate in the X direction. The mass can vibrate in both the Y and Z axes thanks to two sets of straight rays. Along the beam surfaces, the piezoelectric material is already placed. It can transform the beams’ vibrational energy into electrical energy voltage that flows via the rectifier circuit to recharge the battery. A more effective energy harvesting outcome is achieved by the device’s ability to capture vibrational energy along all three axes. Using the COMSOL Multiphysics® programme, it is both developed and simulated. It is proposed that MEMS energy harvesters be mounted to shoes, tyres, or other vibrating surfaces from which it harvests energy from motion while moving while traveling, running, and walking.

Keywords: cantilever beam, piezoelectric, stress, deflection, non-traditional geometry

This article belongs to Special Issue Conference ICEMTA 2023

How to cite this article: Dr S Srinivasulu Raju. Performance Analysis of a Three-DOF Piezoelectric Vibration Energy Harvester. Journal of Polymer and Composites. 2023; 11(09):10-18.
How to cite this URL: Dr S Srinivasulu Raju. Performance Analysis of a Three-DOF Piezoelectric Vibration Energy Harvester. Journal of Polymer and Composites. 2023; 11(09):10-18. Available from:

Full Text PDF Download

Browse Figures


A.G. Fowler, S.O.R. Moheimani, S.A. Behrens, “3-DoF MEMS ultrasonic energy harvester”, IEEE Sensors Journal, 2012, pp. 1-4.
S. Srinivasulu Raju, M. Umapathy and G. Uma, “Piezoelectric energy harvesting with single and multiple condensed cavities”, Journal of Ferroelectrics, vol. 507, pp. 29-42, 2017.
O. Sidek, M.A. Khalid, M.Z. Ishak, M.A. Miskam, “Design and simulation of SOI-MEMS electro-static vibration energy harvester for micro power generation”, 2011 International Conference on Electrical, Control and Computer Engineering (INECCE), 2011, pp. 207-212.
S. S. Raju, M. Umapathy, and G. Uma, Design and analysis of high output piezoelectric energy harvester using non uniform beam, Mech. Adv. Mater. Struct., vol. 27, no. 3, pp. 218–227, 2020. DOI: 10.1080/15376494.2018.1472341.
M. Han, Q. Yuan, X. Sun, H. Zhang, “Design and Fabrication of Integrated Magnetic MEMS En-ergy Harvester for Low Frequency Applications”, Journal of Microelectromechanical Systems, 2014, Vol. 23, Issue 1, pp. 204-212.
S. Srinivasulu Raju, Seung-Bok. Choi, M. Umapathy and G. Uma, “An effective energy harvesting in low frequency using a piezo-patch cantilever beam with tapered rectangular cavities”, Sensor and Actuator A: physical, vol. 297, pp. 111522, 2019.
P. Janphuang, R. Lockhart, D. Briand, N.F. de Rooij, N.F., “On the optimization and performances of a compact piezoelectric impact MEMS energy harvester”, 2014 IEEE 27th International Confer-ence on Micro Electro Mechanical Systems (MEMS), 2014, pp. 429-432.
S. Srinivasulu Raju, M. Umapathy and G. Uma, “Cantilever piezoelectric energy harvester with multiple cavities”, Smart Mater. Struct., vol. 24, pp. 115023, 2015.
A.A.M. Ralib, A.N. Nordin, H. Salleh, “Simulation of a MEMS piezoelectric energy harvester”, 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010, pp. 177-181.
O. Sidek, S. Saadon, “Vibration-based MEMS Piezoelectric Energy Harvester for Power Optimi-zation”, 2013 UKSim 15th International Conference on Computer Modelling and Simulation (UKSim), 2013, pp. 241-246.
S. Srinivasulu Raju, M. Srikanth, T. Niranjan, P. A. Sai and S. K. Mohinuddin, “Design and Devel-opment of MEMS based Piezoelectric Energy Harvester,” 2022 10th International Conference on Emerging Trends in Engineering and Technology – Signal and Information Processing (ICETET-SIP-22), 2022, pp. 1-6, doi: 10.1109/ICETET-SIP-2254415.2022.9791635.
Raju SS, Umapathy M, Uma G. High-output piezoelectric energy harvester using tapered beam with cavity. Journal of Intelligent Material Systems and Structures. 2018;29(5):800-815. doi:10.1177/1045389X17721044
C-F. Hung, T-K. Chung, P-C. Yeh, C-C. Chen, C-M. Wang, S-H. Lin, “A miniature mechanical- piezoelectric-configured three-axis vibrational energy harvester”, IEEE Sensors Journal, 2015, Vol. 15, Issue 10, pp. 5601-5615.

Conference Open Access Review Article
Volume 11
Special Issue 09
Received September 7, 2023
Accepted September 17, 2023
Published November 21, 2023